Onto Innovation Unveils Atlas G6 for Precise Semiconductor Measurements
Onto Innovation has launched the Atlas G6, an advanced optical critical dimension (OCD) metrology system designed to meet the evolving demands of the semiconductor industry.
The Atlas G6 introduces cutting-edge optical technologies for precise measurements, enabling it to handle the growing complexity of advanced semiconductor nodes. It provides precise control of individual nanowire measurements for gate-all-around (GAA) devices, ensuring optimal electrical performance. For hybrid bonding memory (HBM), it enables direct on-device measurements in DRAM cell blocks, enhancing yield and long-term reliability.
The system offers enhanced signal-to-noise performance with smaller spot sizes, ideal for GAA and HBM technologies. It features an additional data channel and employs Onto's proprietary Ai Diffract OCD analysis software and model-guided machine learning algorithms. The Atlas G6 is already securing multiple production orders from leading logic and memory manufacturers, supporting the transition to second-generation GAA logic and future vertical gate DRAM architectures for AI applications.
Onto Innovation's Atlas G6 system, with its advanced optical technologies and precise measurement capabilities, is setting a new standard in optical metrology performance, as stated by Ido Dolev, executive vice president of product solutions. It is poised to drive innovation in the semiconductor industry, particularly in GAA and HBM technologies.
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